RF plasma generator TruPlasma RF 1000 (G2/13)

RF plasma generator - TruPlasma RF 1000 (G2/13) - TRUMPF Power electronics
RF plasma generator - TruPlasma RF 1000 (G2/13) - TRUMPF Power electronics
RF plasma generator - TruPlasma RF 1000 (G2/13) - TRUMPF Power electronics - image - 2
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Characteristics

Type
RF

Description

The decisive factor in coating or structuring surfaces is a stable and reproducible plasma current supply. RF generators of the TruPlasma RF Series 1000 / 3000 (G2/13) offer the best conditions for this with their state-of-the-art power electronics. Their stable output power and high control accuracy guarantee the best results while maintaining high levels of productivity. A high level of accuracy and reproducibility CombineLine technology: Optimal process power due to true 50 ohm output impedance. Independence from the RF cable length Adjusting the cable lengths is no longer necessary – an absolute innovation in the RF area. Robust and safe CombineLine technology: Reliable protection against reflected power in the event of mismatch. Efficient and cost-effective Efficiency of up to 80% enables energy costs to be decreased by up to 50%. Blower-free cooling solution No heating or contamination of the ambient air, meaning operation in clean rooms is also possible.

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