Sputter ion pump is one of the pumps used to generate ultra and extremely-high vacuum. This pump has a simple design with no moving parts to produce wear and vibration. These features make the sputter ion pump the preferred one for the use in accelerators and analysis equipment. ULVAC, Inc. has developed the ACTER series of sputter ion pumps. The ACTER pumps use optimized magnetic field and new ACTER elements to greatly improve the pumping characteristic in the ultra and extremely-high vacuum range and to improve its overall cost performance. As a result of these performance enhancements, the ACTER pumps have been accepted in the accelerator, electron microscope and other scientific field.Ultimate pressure in the 10-10 Pa order achieved with a test dome
complying with ISO standards (CXII, AXII Series)
Excellent pumping performance achieved with the inert gas enhanced
pumping model (type AXII)
Highly efficient bake-out and reduction of magnetic field leakage with
exclusive heater and shield cover
High pumping speed in the ultra-high vacuum range
Longer maintenance-free time
Top-notch pumping characteristics in
ultra and extremely-high vacuum
range (discharging is kept down to
the ultra-high vacuum range)