Turbomolecular vacuum pump UTM-FH, FW series

lubricatedsingle-stageanti-corrosion

Abundant variations from 350L/s to world's largest 6300L/s (digital magnetic controlled bearing type). Maintainable stable pumping performance against change of back pressure (FH series). Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products (FW series). Excellent anti-corrosion surface treatment (excluding 3303FH and 6300FH). Optional special surface treatments (e.g. Nickel plating + cation electrodeposition, special deposited film, aluminum anodization) are available as necessary. Mountable in all direction. Variable speed system makes it possible to change the pumping speed in the range from 25% through 100%. There is no limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system. Self power generation by regenerative energy is used for backup power supply at power outage by using battery free system. Troublesome battery replacement is not necessary. Built-in monitoring/self-diagnostic and communication functions enable to configure centralized monitoring system. Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps. High durability and high reliability have been realized by experiments such as air rushing-in testing, various touching down testing, forced destruction testing for rotor and foreign material drop testing (Si wafer fall).