ATMOSPHERIC PIRANI GAUGE COMBO SW1 & ISG1
This is a wide range pirani gauge which measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr, 5×10-4 mbar) Platinum wire is used for filaments , therefore, the filament will function even at atmospheric pressure.Wide-range Measurement
Measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr,
5×10-4 mbar)
Power Supply Voltage
Powered with 24VDC or 100VAC to 240VAC input
Shock Resistant
Design is highly resistant to shock
Filament Material: platinum (Pt)
Corrosion-resistant platinum is used as the filament material
High Visibility LEDs Used for Error Display
One-touch Adjustment
Atmospheric adjustment and the zero point adjustment can be done
with one-touch
Maintainability
Sensor head can be replaced easily
Measured Value Output Signal
Pressure is 0 to 10V Log output
Control Output Signal
3 set point output
Serial Communication Spec
RS485 communication (ISG1)
Display Unit
With visble LED
Certification
Conforms with CE
Process control in low vacuum range of vacuum equipment such
as that used for semiconductor, optics and Photovoltaic field, FPD,
electronic parts manufacturing
Process control in the low vacuum range for industrial equipment such
as vacuum furnaces, etc.
Process control in low pressure range for vacuum systems with
multiple process chambers such as in-line sputtering and single wafer
processing equipment
For pumping unit (system) which it has a vibration and/or shach in the
manufacture process