COLD CATHODE GAUGE SENSOR UNIT G-TRAN SERIES SC1
G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge. Since no ilament is used, extended life between gauge replacements is assured. Maintenance is expected. Ease of maintenance reduces the cost of ownership.Transducer specification
When the pressure display is not required, the following advantages
can be achieved:
Vacuum gauge cost is reduced because the display has been eliminated
Smaller size frees-up control panel space
Wiring is reduced
Maintenance
Maintenance is greatly simplyied
Filament is eliminated
No damage from exposure to atmospheric pressure
Control output signal
2 setpoint output
Output signal
Pressure reading is a 0 to 10V Log output (non-linear output)
Power supply voltage
Operated by DC24V
SPECIAL FEATURES / FURTHER APPLICATIONS
Process control in the pressure range of precision vacuum equipment
used for semiconductor, optics and electronic parts manufacturing
Process control in low vacuum range for industrial equipment such as
furnaces
Process control in the pressure range for vacuum systems with
multiple process chambers, such as in-line sputtering and single
wafer processing equipment