Function generator DPG-10/DPG-20

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The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.Light-weight/space-saving Light-weight and space-saving design with excellent installation flexibility. Selectable output voltage range We feature a lineup with 800V specification in addition to 1000V specification. Extensive arc handling Extensive arc control methods familiar with plasma. Requires no cooling water Forced air cooling, requires no cooling water. Can be equipped with a high-speed arc shutoff circuit Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option. Can be equipped with a flexible parallel operation function DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12units to work together in parallel operation. (240kW max) SPECIAL FEATURES / FURTHER APPLICATIONS Flat panel display sputtering Semiconductor sputtering Touch panel sputtering Industrial coating sputtering