The DPG-30R is 30kW DC power generator for sputtering application and designed with reliable parts and circuit. And a low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. This power generator can be used as a 30kW to 240kW power generator system by connecting with the dedicated controller.Increased Reliability
Designed with reliable parts and circuit.
Equipped with Low Arc Energy Circuit
A low arc energy circuit, which interrupts output immediately
when arc is generated, is equipped as standard specification.
Wide Range Power Output Control
Possible to output up to 120kW and control up to 4 units of
power generator (DPG-30R) at same time by a single controller
(DPGMC120R).
Possible to output up to 240kW and control up to 8 units of
power generator (DPG-30R) at same time by a single controller
(DPGMC240R).
No Cooling Water is Required
Air-cooled.
Wide Range Input Power
AC380 to 480V ±10%.
Operation Without Controller
Possible to operate without the controller by using external
control terminal in the case of 30kW or lower.
SPECIAL FEATURES / FURTHER APPLICATIONS
Flat panel display sputtering
Semiconductor sputtering
Industrial coating sputtering