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Voltage generator DPG-30 R

Voltage generator - DPG-30 R - ULVAC GmbH
Voltage generator - DPG-30 R - ULVAC GmbH
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Characteristics

Type
voltage

Description

The DPG-30R is 30kW DC power generator for sputtering application and designed with reliable parts and circuit. And a low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. This power generator can be used as a 30kW to 240kW power generator system by connecting with the dedicated controller.Increased Reliability Designed with reliable parts and circuit. Equipped with Low Arc Energy Circuit A low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. Wide Range Power Output Control Possible to output up to 120kW and control up to 4 units of power generator (DPG-30R) at same time by a single controller (DPGMC120R). Possible to output up to 240kW and control up to 8 units of power generator (DPG-30R) at same time by a single controller (DPGMC240R). No Cooling Water is Required Air-cooled. Wide Range Input Power AC380 to 480V ±10%. Operation Without Controller Possible to operate without the controller by using external control terminal in the case of 30kW or lower. SPECIAL FEATURES / FURTHER APPLICATIONS Flat panel display sputtering Semiconductor sputtering Industrial coating sputtering
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.