Dry vacuum pump LS Series

rotary vanesingle-stage

- High pumping speed near atmospheric pressure drastically reduces pump down time. - Built-in ECO-SHOCK technology reduces power consumption significantly for clean applications. - Built-in silencer achieves a noise level of 61dB(A) or less Low Running-Cost - Available in 4 models with pumping speeds betweenn 120~1200m3/h Clean Process ("C-Type"): For clean processes involving gasses like Air and N2 (LS***A-C) - TMP backing pump etc. - Load lock room - Lamination - Vapor deposition - Sputtering Light Process ("L-Type"): For light processes involving steam and other difficult gases (LS***A-L) - General industrial use - Ashing - Freeze drying - Vacuum drying