Metal hot plate HP-300
electricprecision

metal hot plate
metal hot plate
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Characteristics

Material
metal
Other characteristics
electric, precision

Description

This high precision hot chuck has a heated area with 310 x 310 mm. It can be used as build-in or stand-alone chuck with an external controller. The vacuum hot plate has vacuum holes in a pitch of 25mm each (1mm Diameter) for holding the substrate or wafer. The maximum temperature is 300 °C. 3-Zone-temperature measurement incl. Software for managing the temperature profiles

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