Ion sputtering source MERKURION-150-BASIC

Category - MERKURION® basic Item description - Ion Getter Pump, Diode pump element style (positive polarity) with inlet flange DN 100 CF and nominal pumping speed 145 l/s. Electrical connector 10 kV SHV (compatible with SAFECONN) at +3000 .. +7000 V Bakeout temperature (without magnet) - 450 °C Bakeout temperature (with magnet) - 250 °C Article no. - 373823 Connection type - CF Nominal diameter DN - 100 Outer diameter - 152 mm Min. operating voltage - 3 kV DC High voltage connection - 10 kV SHV (SAFECONN) With heater - No Max. operating voltage - 7kV DC Stable for noble gas - No Pumping element - Conventional Diode Purity class - PCS Min. ultimate pressure - 1E-11 mbar Max. starting pressure - 1E-3 mbar Nominal pumping speed - 145 l/s