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High-vacuum valve 151 seriesgatepneumaticisolation
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Function
- isolation
- Body
- aluminium
- Applications
- high-vacuum, for the semiconductor industry
- Other characteristics
- double-acting
- DN
63 mm, 100 mm, 160 mm, 200 mm, 250 mm
(2.48 in, 3.937 in, 6.299 in, 7.874 in, 9.843 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 4 bar
(58 psi)- Temperature
Max.: 250 °C
(482 °F)Min.: 0 °C
(32 °F)- Flow rate
480 l/s, 1,700 l/s, 6,000 l/s, 12,000 l/s, 19,400 l/s
(126.8 us gal/s, 449.09 us gal/s, 1,585.03 us gal/s, 3,170.06 us gal/s, 5,124.94 us gal/s)
Description
For applications where low particle count and low shock impact are a must. Often used in R&D, but also in semiconductor process systems.
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Gate valves, pendulum valves, Butterfly valves
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.