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Gate valve 651 serieselectricisolationpressure-control
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Characteristics
- Type
- gate
- Operation
- electric
- Function
- isolation, pressure-control
- Body
- aluminum, anodized aluminum
- Applications
- for the semiconductor industry
- Other characteristics
- for corrosive environments, motor-driven, with stepper motor
- DN
Min.: 160 mm
(6.299 in)Max.: 400 mm
(15.748 in)- Pressure
Min.: 4 bar
(58 psi)Max.: 7 bar
(101.5 psi)- Temperature
Min.: 0 °C
(32 °F)Max.: 120 °C
(248 °F)
Description
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .
Catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.