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Gate valve 031 seriespneumaticlockablealuminum
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Body
- lockable, aluminum
- Applications
- for the semiconductor industry
- Associated function
- transfer
- Other characteristics
- double-acting
- DN
Max.: 420 mm
(16.535 in)Min.: 32 mm
(1.26 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 3 bar
(43.5 psi)- Temperature
Max.: 40 °C
(104 °F)Min.: 0 °C
(32 °F)
Description
For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. - Mechanically locked in closed position - Low shock - Differential pressure tabs PEEK instead standard SUS (option)
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.