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Gate valve 032 seriespneumaticlockablestainless steel
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Characteristics
- Type
- gate
- Operation
- pneumatic
- Body
- lockable, stainless steel, aluminum
- Applications
- for the semiconductor industry
- Associated function
- transfer
- Other characteristics
- double-acting
- DN
Max.: 500 mm
(19.685 in)Min.: 32 mm
(1.26 in)- Pressure
Max.: 7 bar
(101.5 psi)Min.: 3 bar
(43.5 psi)- Temperature
Max.: 40 °C
(104 °F)Min.: 0 °C
(32 °F)
Description
For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. - Low shock - Protected bellows - Long life time - locked pneumatically (option) - easy gate exchange
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogsOther VAT Vakuumventile AG products
Transfer valves and doors for SEMI
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.