50 mm, 336 mm, 480 mm, 500 mm (1.969 in, 13.228 in, 18.898 in, 19.685 in)
Pressure
Min.: 4 bar (58 psi)
Max.: 7 bar (101.5 psi)
Temperature
Min.: 0 °C (32 °F)
Max.: 120 °C (248 °F)
Description
For load lock / process module isolation. For 300mm and 450mm semiconductor applications.
Actuator
Other solenoid valve voltage (standard 24VDC)
Insert
Other sealing materials, e.g. FFKM, VMQ, FVMQ gate seal
O-ring seal in gate instead of the vulcanized seal (standard)
Gate stainless steel
Double position indicator
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.