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- Solenoid valve
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Solenoid valve 061 series
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Characteristics
- Temperature
Min.: 0 °C
(32 °F)Max.: 120 °C
(248 °F)
Description
Transfer valve for Generation 4 up to 11 Flat Panel Display production systems. In the FPD production systems the TwinVAT transfer valve is used for load lock, transfer, process chamber isolation.
Valve
Process control unit (PCU) and solenoid valves
Surface treatment, e.g. hard anodized aluminum
Vacuum gauge to detect the pressure inside the valve body
Vertical mounting position
Gate
Other sealing materials
Electrical grounding
Catalogs
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Transfer valves and doors for display & solar
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.