Transfer valve for thin film production systems of photovoltaic panels/cells. In the thin film PV production systems the SolVAT transfer valve is used for load lock, transfer and process chamber isolation.
Valve
Surface: Body and gate anodized
Various sealing materials
Vertical mounting orientation
Watercooling in body to cool the flange seals
Actuator
Bellows feedthrough
PTFE bellows feedthrough (protection bellows)