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Pressure-control valve 612 seriesbutterflyelectrically-actuatedwith ISO flange connections
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Characteristics
- Type
- butterfly
- Operation
- electrically-actuated
- Function
- pressure-control
- Body
- with ISO flange connections, stainless steel, anodized aluminum
- Applications
- for the semiconductor industry
- Other characteristics
- ISO, with stepper motor
- DN
Max.: 320 mm
(12.598 in)Min.: 25 mm
(0.984 in)- Pressure
Max.: 1,000 mbar
(14.5 psi)Min.: 75 mbar
(1.1 psi)- Temperature
Max.: 150 °C
(302 °F)Min.: 35 °C
(95 °F)- Flow rate
Max.: 27,000 l/s
(7,132.65 us gal/s)Min.: 6 l/s
(1.59 us gal/s)
Description
Field of application: Semiconductors, FPD / CVD systems and industrial processes.
Catalogs
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See all of VAT Vakuumventile AG‘s catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.