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Butterfly valve 615 serieselectrically-operatedisolationpressure-control
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Characteristics
- Type
- butterfly
- Operation
- electrically-operated
- Function
- isolation, pressure-control
- Body
- stainless steel, anodized aluminum
- Applications
- for the semiconductor industry
- Other characteristics
- high-pressure
- DN
40 mm, 50 mm, 63 mm, 80 mm, 100 mm
(1.575 in, 1.969 in, 2.48 in, 3.15 in, 3.937 in)- Pressure
1,000 mbar
(14.5 psi)- Temperature
50 °C, 120 °C
(122 °F, 248 °F)
Description
Semiconductors, FPD and industrial processes, particularly CVD systems.
Actuator
Ultra fast actuator (90 ms)
Controller with configurable PI parameters
RS232 interface with 2 analog outputs
Ethernet interface
DeviceNet interface
Logic interface
Profibus interface
RS-485 interface
CC-Link interface
EtherCAT interface
SPS = ± 15V DC Sensor Power Supply at power failure)
PFO = Power Failure Option (valve closes or opens automatically
Valve
Diameter Nominal: DN 40 / 50 with ISO-KF DN 63 / 80 / 100 with ISO-F
Other flanges (JIS, ASA-LP, CF-F)
Customer specified flanges
Aluminum hard anodized or nickel-plated
Other sealing materials
Heater with insulation for valve temperatures 80°C, 100°C, 120°C
Catalogs
No catalogs are available for this product.
See all of VAT Vakuumventile AG‘s catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.