MBE system GEN200®

The GEN200 system, manufactured by VEECO, is a multi-4" production MBE system. This device is characterized with a high-capacity and cost-effective production, wherein it provides a long campaign, comprehensive wafer quality, and extensive throughput for the pump lasers, HBTs and VCSELs. This device is capable of providing the lowest cost 4x4" epiwafer growth. The GEN200 multi-4" production MBE system has the capacity of two growth modules that increases the allowable process of the unlike materials.