MBE system GEN930®

Veeco's GEN930 MBE system is suitable for developing III-V or II-VI materials, complete with a direct pump coupling for nitride and oxide applications. The tool has a modular design, which ensures a cost-efficient and flexible solution that is capable of providing proven material quality. This equipment can be integrated with an analytical equipment for in-situ monitoring of growth processes. In addition, the device offers a versatile platform features in in-situ monitoring techniques such as RHEED, pyrometry, ellipsometry, RGA, optical flux monitoring and reflectance spectroscopy.