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Electron beam engraving system NEXUS® IBE-350Se™

Electron beam engraving system - NEXUS® IBE-350Se™ - VEECO
Electron beam engraving system - NEXUS® IBE-350Se™ - VEECO
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Characteristics

Technique
electron beam

Description

The NEXUS IBE-350Se Series of Electron Beam Engraving System, manufactured by VEECO, is specifically designed in intense power production with improved substrate cooling. This device can generate with intense throughput and can reduce footprint for minimal cost of ownership. Moreover, this product is suitable for use to cluster on common NEXUS pattern. It can maximize the productivity of ABS deep cavity processing and intense etch rate utilization.

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