Ion source SOLUS™

SOLUS DC Ion Source Controllers Industry-Leading Power Delivery System for Veeco's DC Gridded Ion Sources Veeco's SOLUS™ DC Ion Source Controller features a state-of-the-art precision control system design, providing reliable and stable power for ion source operation in all types of processes. Integrated power modules and gas flow control with ratio capabilities allow for optimal ion source control and performance in the most demanding process environments. Easy to use single button operation Manual, automated and remote operations options Cutting-edge control for improved plasma stability Integrated and configurable gas flow control Customizable control settings for tailored source operation Time-saving troubleshooting features Useful events and status logging screen