Non-contact confocal sensor NFP

With the Nano Focus Probe, the workpiece surface can be captured as a 3D point cloud and the size, mould, position and roughness on micro-structures can be evaluated. Stray light suppression enables reliable 3D measurement of the topography even of reflective surfaces with probing errors in the submicrometre range. The confocal optical sensor also delivers good results on steep flanks with large angles of inclination. • Different lenses allow the sensor to be adapted to the task at hand • The sensor can be used in the entire measuring volume of the coordinate measuring machine and the measurement results can be linked in the same coordinate system • A total surface can be calculated from several adjacent partial point clouds almost without loss of accuracy Measuring range Measurement "in the image" with integrated Z-axis 250 µm Accuracy Permissible probing error up to 0.15 µm Functionality By moving the probe head with a) illumination, b) camera, c) pinhole and d) imaging optics relative to the workpiece e) the intensity of the light points f), g) is varied by defocusing. The overlapping of the defocused light points f) is avoided by large distances g).