Semiconductor, display and photovoltaic industry
Ultrapure media and special gas systems (gas supply systems, bulk-gas supply, tank farm installations)
Special Features
Secure and fast availability
Developed for applications in hazardous areas
Variable: Compact design and many configurations
Accurate measurement, even with high temperature fluctuations
Description
The models WUC-10, WUC-15 and WUC-16 are particularly compact, ultra high purity transducers for pressure measurement of ultrapure gases in the semiconductor industry, especially for hazardous areas. The wetted parts consist of SEMI F20-compliant, electropolished stainless steel 316L and a special 2.4711/UNS R30003 thin-film sensor. The transducers feature excellent EMC stability and a variety of electrical and process connections. The easy access side potentiometer provides convenient zero point setting. Each individual transducer is checked for leak tightness and accuracy.
Secure and fast availability
The WUC series is manufactured under clean room conditions and strictly monitored. The large production capacity guarantees maximum delivery reliability for high-volume customers. This saves time, minimises risk and increases productivity.
Developed for applications in hazardous areas
The WUC series, which was developed for hazardous areas, offers many local and international explosion protection approvals.
Variable: Compact design and many configurations
The WUC series offers the industry-standard grid dimension of 28.4 mm [1⅛ in] with low installation height as well as the widest range of electrical and process connections.