Semiconductor power device C-V characteristic testing system
Capacitance-voltage (C-V) measurements are widely used to measure semiconductor parameters, especially MOS CAP and MOSFET structures. The capacitance of the MOS (metal-oxide-semiconductor) structure is a function of the applied voltage. The curve of the MOS capacitance changing with the applied voltage is called the C-V curve (referred to as the C-V characteristic). The C-V curve test can easily determine the silicon dioxide layer thickness dox , substrate doping concentration N, movable charge surface density Q1 in the oxide layer, and fixed charge surface density Qfc and other parameters.
•Wide frequency range: the frequency range is 10Hz~1MHz, and the continuous frequency
points are adjustable;
•High precision and wide range: providing a bias range of 0V to 3500V, with an accuracy of
0.1%;
•Built-in CV testing: Built-in automated CV testing software, including multiple testing functions
•such as C-V (Capacitance-voltage), C-T(Capacitance-time), C-F (Capacitance-frequency), etc;
•Compatible with IV testing: supports both breakdown and leakage current characteristics
testing;
•Real time curve drawing: The software interface directly shows test data and curves for easy
viewing;
•Strong scalability: The system adopts modular design and can be flexibly matched according
to needs;