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High-accuracy stage XLS-1 Precision Series
linearpiezovacuum-compatible

High-accuracy stage - XLS-1 Precision Series - Xeryon - linear / piezo / vacuum-compatible
High-accuracy stage - XLS-1 Precision Series - Xeryon - linear / piezo / vacuum-compatible
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Characteristics

Orientation
linear
Type
piezo
Other characteristics
high-accuracy, vacuum-compatible, with sub-nanometer resolution
Stroke

Max.: 102 mm
(4.016 in)

Min.: 27 mm
(1.063 in)

Speed

Max.: 200 mm/s

Min.: 0 mm/s

Description

The Xeryon Linear Stage (XLS) is a precise linear stage driven by a noiseless ultrasonic piezo motor. This allows fast positioning with nanometre accuracy. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, energy consumption and heat generation are considerably reduced. The integrated encoder has a resolution of 310 nm.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.