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Linear stage XLS-1 Ultimate Series
piezosub-micron precisionvacuum-compatible

Linear stage - XLS-1 Ultimate Series - Xeryon - piezo / sub-micron precision / vacuum-compatible
Linear stage - XLS-1 Ultimate Series - Xeryon - piezo / sub-micron precision / vacuum-compatible
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Characteristics

Orientation
linear
Type
piezo
Other characteristics
sub-micron precision, vacuum-compatible, with sub-nanometer resolution
Stroke

Max.: 102 mm
(4.016 in)

Min.: 27 mm
(1.063 in)

Speed

Max.: 200 mm/s

Min.: 0 mm/s

Description

The Xeryon Linear Stage (XLS) is a precise linear stage driven by a noiseless ultrasonic piezo motor. This allows fast positioning with nanometre accuracy. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, energy consumption and heat generation are considerably reduced. The integrated encoder has a resolution of 10 nm.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.