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XY stage
piezo2-axishigh-accuracy

XY stage - Xeryon - piezo / 2-axis / high-accuracy
XY stage - Xeryon - piezo / 2-axis / high-accuracy
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Characteristics

Orientation
XY
Type
piezo
Number of axes
2-axis
Other characteristics
high-accuracy, vacuum-compatible, non-magnetic, with sub-nanometer resolution
Stroke

Max.: 107 mm
(4.213 in)

Min.: 27 mm
(1.063 in)

Speed

Max.: 200 mm/s

Min.: 0 mm/s

Description

The XY-XLS consists of two XLS stages stacked on top of each other without the use of an extra adapter plate. With the XY-XLS one can position in 2-DOF with nanometre precision and repeatability. Because of the ultrasonic drive principle of the XLS stage, the XY-XLS has a long lifetime, fast, noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s). These features makes it the perfect microscope stage or multi-DOF positioner for material science applications. The XY-XLS can be used in vacuum and made from non-magnetic materials.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.