Zaber’s vacuum vertical stages (X-VSR-SV) with built-in controllers are compatible for high (10^-6 Torr) and low (10^-3 Torr) vacuum environments. The built-in controller allows daisy-chaining with other Zaber products, and requires only four feedthrough wires to control all units in the daisy-chain via serial port (with an X-PIB adaptor). The X-VSR-SV is capable of speed up to 48 mm/s and up to 200 N thrust with a 10 kg load capacity.