MEMS NO2 gas sensor is using MEMS micro-fabrication hot plate on a Si substrate base, gas-sensitive materials used in the clean air is low conductivity metal oxide semiconductor material. When the sensor exposed to gas atmosphere, the conductivity is changing as the detected gas concentration in the air. The higher the concentration of the gas, the higher the conductivity. Use simple circuit can convert the change of conductivity of the gas concentration corresponding to the output signal.
Application
Mostly used in the fixed or portable NO2 detector or alarms.
Features
MEMS technology, Strong construction
High sensitivity to NO2 gas
Small sizes and low power consumption
Fast response and resume
Simple drive circuit, Long lifespan