Capacitance diaphragm vacuum sensor ZNX series

analogwith controllercompact

The ZNX Sensor is a non-contact position measuring system based on the principle of capacitance’ micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor. The spacing of these two plates can be measured, using the appropriate electronic controller, to better than 0.1 nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the ZNX Sensor is a noncontact method, it is free of hysteresis. No power is dissipated at the point of measurement. · Precision measurement to picometres · Stability of measurement · Tuneable to meet application requirements · Options for a wide range of applications -Main features- Range 20 ~ 1250μm; Subnanometer position resolution; Zero hysteresis; Linearity error down to 0.02%; Bandwidth up to 5 kHz; Super Invar terms available; Vacuum compatible options; Linearity Error (%):<0.08, <0.08, <0.06, <0.05; Short Range μm: 20, 100, 250; Long Range μm: 50, 100, 500; Analogue Output: ± 5, ± 5, ± 5, 8; Maximum Bandwidth: 5, 5, 5, 12.5Khz.