Displacement measurement interferometer ZMI™ Series

opticallaserfor lithography applications

ZYGO’s standard interferometer configurations support many types of measurement scenarios. Most interferometers can support a straight-through or right-angle measurement orientation and can be manufactured for operation in vacuum. This unit measures retroreflector targets for tracking objects moving primarily in one linear dimension or rotating about a fixed point. ZYGO offers a standard and compact size linear interferometer to accommodate different system space constraints. Examples: Reticle stages, gantry systems, steering mirrors This unit measures plane mirror targets for tracking objects moving in multiple linear dimensions with limited rotations. ZYGO’s plane mirror interferometers are designed for high stability to mitigate thermal error. Examples: Wafer stages, stacked stage systems This unit measures changes in the index of refraction for use in compensating other measurement axes. ZYGO’s Compact Wavelength Compensator provides high precision feedback of index change for best performance of displacement measurement in ambient conditions. Complete the measurement system by routing the beam from the laser to the interferometers and ultimately to the measurement electronics. ZYGO offers a variety of standard fold mirrors, beamsplitters, fiber optic pickups, and fiber cables for flexible configuration of your measurement system.