Laser interferometer Qualifire™

Fizeau

For more than 50 years, phase-shifting interferometry has been the technology of choice for high-precision surface form metrology instruments. These interferometers provide fast and reliable measurements of surface form error and transmitted wavefront of optical components, systems, and assemblies. From research environments to a wide range of industrial applications, laser interferometers offer high levels of data traceability for quality assurance and post-production analysis. They have become an integral part of the manufacturing process. Zygo’s Qualifire represents a leap forward for laser interferometers by providing solutions to known challenges for instruments of this type. A New Approach to Phase Shifting Interferometry Common to optical metrology in many modern systems, the Fizeau design uses a fixed, on-axis coherent point source to illuminate the interferometric cavity. For the most part, it works very well. While phase-shifting and fixed illumination remain the gold standard, Zygo is always looking for improvements and has explored the benefits of dynamic illumination with the new Flying Spot option. The Qualifier laser interferometer offers many novel, new features. - Flying Spot: new Coherent Artifact Reduction technique - Plano Cavity Autofocus - Stable Zoom - Smart Accessories