Brooks instruments DC flow meters

Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar
Precision: 0.35, 1 %

One device. Multiple gases and flows. Maximum flexibility. Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 34.47 bar

... controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ...

Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 10.34 bar
Precision: 0.35, 1 %

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 7 psi - 90 psi

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial and semiconductor processes, both ...

Volumetric flow rate: 40 l/min
Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar

... response for time-critical flow processes. The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key ...

Volumetric flow rate: 0 l/min - 30,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide ...

Process temperature: 0 °C - 150 °C
Process pressure: 0 psi - 90 psi
Precision: 1, 0.35 %

high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources to support the growing usage of these ...