Brooks instruments flow meters

Mass flow rate: 10 g/h - 27,000 g/h
Process temperature: 0 °C - 65 °C
Process pressure: 10 psi - 200 psi

... measurement and control of very low flow rates of liquid or gas with the new series of Quantim® QMC Coriolis flow meters and controllers from Brooks Instrument. This third-generation ...

Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar
Precision: 0.35, 1 %

One device. Multiple gases and flows. Maximum flexibility. Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 34.47 bar

... controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ...

Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 10.34 bar
Precision: 0.35, 1 %

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control ...

Volumetric flow rate: 0 l/min - 1,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... require. Features • Fast flow response to command changes with negligible overshoot/undershoot • Removable flow sensor • Insensitive to mounting attitude • Mechanically and electrically compatible ...

Volumetric flow rate: 0 l/min - 36,000 l/min
Process temperature: -14 °C - 65 °C
Process pressure: 310, 100, 70 bar

... mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass ...

Volumetric flow rate: 40 l/min
Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar

... response for time-critical flow processes. The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key ...

Volumetric flow rate: 0 l/min - 50 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 150 psi

When you need a compact, economical mass flow meter that delivers long-term, stable flow measurement without requiring temperature or pressure correction, the 5700 Series thermal mass ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 7 psi - 90 psi

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial and semiconductor processes, both ...

Volumetric flow rate: 0 l/min - 30,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide ...