Brooks instruments thermal mass flow meters

Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar
Precision: 0.35, 1 %

One device. Multiple gases and flows. Maximum flexibility. Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 34.47 bar

High purity flow path. Outstanding performance, reliability, and repeatability. Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series ...

Process temperature: 0 °C - 50 °C
Process pressure: 0 bar - 10.34 bar
Precision: 0.35, 1 %

... levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow ...

Volumetric flow rate: 0 l/min - 1,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... product line has a workhorse — our 5850E Series thermal mass flow controller fits the bill. Actively in use for decades in thousands of applications worldwide, it utilizes a unique, extremely ...

Volumetric flow rate: 0 l/min - 36,000 l/min
Process temperature: -14 °C - 65 °C
Process pressure: 310, 100, 70 bar

Precision mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Whether it’s dust, moisture, temperature extremes or wash-down requirements, the ...

Volumetric flow rate: 40 l/min
Process temperature: 5 °C - 50 °C
Process pressure: 0 bar - 10 bar

... time-critical flow processes. The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can ...

Volumetric flow rate: 0 l/min - 50 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 150 psi

When you need a compact, economical mass flow meter that delivers long-term, stable flow measurement without requiring temperature or pressure correction, ...

Volumetric flow rate: 0 l/min - 300 l/min
Process temperature: 0 °C - 50 °C
Process pressure: 7 psi - 90 psi

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters Raises the standard in performance for value-driven metal sealed applications. For many industrial ...

Volumetric flow rate: 0 l/min - 30,000 l/min
Process temperature: 0 °C - 65 °C
Process pressure: 0 psi - 1,500 psi

... inch Ra avg • Removable flow sensor • Insensitive to mounting attitude • Mechanically and electrically compatible with other mass flow controllers • TTL compatible "valve off" and ...

Process temperature: 0 °C - 150 °C
Process pressure: 0 psi - 90 psi
Precision: 1, 0.35 %

high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources ...