Magnescale exposed linear encoders

Length: 40 mm - 420 mm
Resolution: 0.01 µm - 0.1 µm
Linear encoder speed: 0 mm/s - 400 mm/s

High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines. High-resolution scale with signal ...

Length: 90 mm - 3,740 mm
Resolution: 0.01 µm - 1 µm
Linear encoder speed: 200 m/min

Wide gap and clearance tolerance Individual non-contact component design 5 nm high-resolution Protocol : FANUC, Mitsubishi, YASKAWA, SIEMENS AG

Length: 200 mm - 30,000 mm
Resolution: 10 µm
Linear encoder speed: 300 m/min

Non-contact detection and a long measuring range Magnetic principle Excellent resistance to workshop conditions (PL20C equivalent to IP65). Max response speed: (varies with the read head and settings) Available in lengths (SL130) High ...

Length: 200 mm - 8,000,000 mm
Resolution: 5, 10 µm
Process temperature: -5 °C - 45 °C

Non-contact, detection and a high response speed Magnetic principle Excellent resistance to workshop conditions Resistant to oil, dirt, vibrations and shocks Accuracy: +/-(15 + 5L/1,000)μm (L=measuring length in mm) Resolution SL331 ...

Length: 50 mm - 100,000 mm
Process temperature: 0 °C - 45 °C

... spaces Non-contact detection Magnetic detection system with excellent resistance to dust, oil, vibrations and shocks. Detects linear displacement and produces analog or AB quadrature signal output when connected to PL101 ...

Length: 200 mm - 30,000 mm
Resolution: 10 µm
Linear encoder speed: 300 m/min

Non-contact detection and a long measuring range Magnetic principle Excellent resistance to workshop conditions (PL20C equivalent to IP65). Resistant to oil, dirt, vibration, and shock. Max response speed: (varies with the read head ...

Resolution: 0.01 nm - 62 nm
Linear encoder speed: 0 mm/s - 1,800 mm/s
Process temperature: 10 °C - 30 °C

High-accuracy, reflective Laserscale with signal pitch of 250 nm. Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes Signal pitch : 250 nm High accuracy : ±1 µm / 420 mm High response ...

Length: 30 mm - 1,070 mm
Resolution: 0.01 nm - 400 nm
Linear encoder speed: 5 m/s

Laserscale for motion control to achieve high resolution and high speed. It can be used not only as a scale for high-speed control of stages and picometer-level fine control, but also as a sensor for high-resolution tilt control of tilt ...

Length: 30 mm - 1,060 mm
Resolution: 0.05, 0.02, 0.4, 0.1 µm
Linear encoder speed: 3, 2.33, 1.66 mm/s

High accuracy, high response linear scale with signal pitch of 400 nm. Supports a wide range of applications and offers the highest performance in its class. Achieves a measuring length of up to 1,060 mm upon request, ...