Magnescale high-speed linear encoders

Length: 40 mm - 420 mm
Resolution: 0.01 µm - 0.1 µm
Linear encoder speed: 0 mm/s - 400 mm/s

High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision ...

Length: 70 mm - 3,770 mm
Resolution: 0.01 µm - 1 µm
Linear encoder speed: 200 mm/min

Wide gap and clearance tolerance Individual non-contact component design 5 nm high-resolution Sealed structure with IP67 protection grade Protocol : FANUC, Mitsubishi, YASKAWA, SIEMENS AG

Length: 200 mm - 8,000,000 mm
Resolution: 5, 10 µm
Process temperature: -5 °C - 45 °C

... and a high response speed Magnetic principle Excellent resistance to workshop conditions Resistant to oil, dirt, vibrations and shocks Accuracy: +/-(15 + 5L/1,000)μm (L=measuring length in mm) Resolution ...

Resolution: 0.01 nm - 62 nm
Linear encoder speed: 0 mm/s - 1,800 mm/s
Process temperature: 10 °C - 30 °C

High-accuracy, reflective Laserscale with signal pitch of 250 nm. Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes Signal pitch : 250 nm High ...

Length: 30 mm - 1,070 mm
Resolution: 0.01 nm - 400 nm
Linear encoder speed: 5 m/s

Laserscale for motion control to achieve high resolution and high speed. It can be used not only as a scale for high-speed control of stages and picometer-level fine ...

Length: 30 mm - 1,060 mm
Resolution: 0.05, 0.02, 0.4, 0.1 µm
Linear encoder speed: 3, 2.33, 1.66 mm/s

High accuracy, high response linear scale with signal pitch of 400 nm. Supports a wide range of applications and offers the highest performance in its class. Achieves ...