Precision STAGE linear motor-driven positioning stages

Speed: 500 mm/s
Repeatability: 0.5 µm
Load: 50 kg

E-GLMT-XY (High Precision Linear Motor Stage) XY Linear motor stage Short Description: ● Linear motors ● ...

Repeatability: 1.5 µm
Load: 10 kg

... microscope linear motor platform is a product specially designed and developed for mainstream research-level inverted microscopes. It has the advantages of better precision, faster response, higher speed ...

Speed: 50, 100, 20, 300 mm/s
Repeatability: 300, 20, 100, 2, 200 nm
Load: 8, 10 kg

... series Standard desktop-level vibration isolation system Three-axis optional high-precision linear motor or high-stability stepper motor motion stage The drive ...

Speed: 1,000 mm/s
Load: 30 kg

E-LMTE390-XY-330X330 Large travel hollow linear motor stage Short Description: It is used in large hollow microscopes and is widely used in semiconductor inspection.

Speed: 300 mm/s
Repeatability: 150 nm
Load: 25 kg

... behind this stage is Precision-stage series brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed ...

Speed: 200 mm/s
Repeatability: 10 nm
Load: 6 kg

... behind this stage is Precision-stage series brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed ...

Speed: 2 m/s
Repeatability: 0.3 µm
Load: 1 g

... structure processing, good rigidity and stability, high flatness ● Non-contact direct drive motor, ultra-high precision and excellent dynamic performance ● Ironless motor, the speed ...

Stroke : 100 mm
Speed: 0 mm/s - 500 mm/s
Repeatability: 0.1 mm

Small linear motor coplanar air bearing Stage Magnetic preloaded air guide

Stroke : 300 mm
Speed: 0 m/s - 500 m/s
Repeatability: 0.05 mm

E-CPA-XY （coplanar air bearing XY Stage） Short Description: The X-axis beam is made of alumina ceramics. Compared with marble beams, ceramic beams have better accuracy, stability and wear resistance.

Speed: 1,000 mm/s
Repeatability: 0.2 mm
Load: 10 kg

... this stage is Precision-stage brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness ...