RoboTechnik Intelligent Technology Co Ltd process automation systems

... detection ● Optional support MES interface and remote debug function ● OEE statistics & Energy consumption analysis ● Ceramic sucker, ceramic quick insert top gear ● Standard ion split air knife ● Optional support ...

... Optional support MES interface and remote debug function ● Intelligent machine, OEE statistics and energy consumption analysis function ● Standard boat temperature detection, vertical shooting boat, ceramic suction ...

Process : ● Adapt to M2 (156.75),M4 (161.75),G1 (158.75),M6 (166),M10(182),M12(210) and 230mm silicon wafers ● Compatible to different sizes of PERC equipment Features : ● Loading and unloading: Cassette or Stack ● ...

Process : ● Adapt to M2 (156.75), M4 (161.75), G1 (158.75), M6 (166), M10 (182), M12 (210) and 230mm silicon wafers ● Compatible to different brands of wafer texuring and PSG removal equipment Features : ● Input: ...

Process : ● Adapt to M2 (156.75), M4 (161.75), G1 (158.75), M6 (166), M10 (182), M12 (210) and 230mm silicon wafers ● Compatible to different brands of wafer texuring and PSG removal equipment Features : ● Input: ...

... brand HALM or WAVELAB Cell classification number display and print function ● RFID tag identification function ● IGV intelligent docking function Advantage : ● High Accuracy (SMega Pixel Smart Camera ...

Process : ● Adapt to M2 (156.75), M4 (161.75), G1 (158.75), M6 (166), M10 (182), M12 (210) and 230mm silicon wafers ● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment Suitable for HJT ...