Steinmeyer 2-axis positioning stages

Stroke : 1 mm - 50 mm
Speed: 1 mm/s - 50 mm/s
Repeatability: 0.3 µm - 5 µm

KT105-50 High resolution XY stage Application: vacuum-XY-stage Benefit: fast and high resolution Features : parameters for yaw and pitch three times better than ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: ...

Speed: 180 mm/s - 270 mm/s
Repeatability: 0.001 µm - 1 µm
Load: 3 kg

High-resolution rotary stage with aperture HV / UHV, DUV, cleanroom ISO 6, n x 360°, rep 0.0005°, 3 kg load, speed 270°/s • - Cleanroom: variants up to class ISO 6 (higher on request) • - Vacuum: ...

Stroke : 20 mm - 200 mm
Speed: 5 mm/s - 10 mm/s
Repeatability: 0.02 µm - 30 µm

Precise verticalLA97-MT85 Application: Multi-purpose manipulator Benefit: for high-resolution scanning Features: Positioning with very high resolution • - Vacuum: all pressure ranges HV / UHV up to 10-11 • - ...

Stroke : 1 mm - 24 mm
Speed: 1 mm/s - 5 mm/s
Repeatability: 0.03 µm - 5 µm

KDT120-20 High resolution XY stage Application: vacuum-XY-stage Benefit: fast and high resolution Features: parameters for yaw and pitch three times better than ...

Stroke : 5 mm - 40 mm

• For applications in industry, research and development • For exact positioning and adjusting of optics, precision workpieces or other test objects Technical data • Load-bearing capacity 50 - 200 N • Travel range ...