Steinmeyer electric positioning stages

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

LT300 Precise high load linear stage Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ...

Stroke : 1 mm - 185 mm
Speed: 1 mm/s - 8.4 mm/s
Repeatability: 0.4 µm - 5 µm

LA95 - Application: transport stage, scanning stage - Benefit: high life time despite dry lube - Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 2.2 mm/s
Repeatability: 1 µm - 5 µm

HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.7 µm - 5 µm

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 3.4 mm/s
Repeatability: 0.3 µm - 5 µm

HT240 Precise high load vertical lifting stage Application: Vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 7 mm
Speed: 1 mm/s - 3.6 mm/s
Repeatability: 0.4 µm - 1 µm

... - [mm] 10 5 20 ____________________________________________________ Positioning speed - [mm/s] 25 10 25 ____________________________________________________ Max. ...

Stroke : 25 mm - 50 mm
Speed: 30 mm/s - 60 mm/s
Repeatability: 1.6 µm - 2.1 µm

... linear stage is easy to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It convinces with an optimal price-performance ratio with tested exceptionally high durability. For this ...

Stroke : 1 mm - 50 mm
Speed: 20 mm/s - 40 mm/s
Repeatability: 2.3 µm - 4.3 µm

... EUV linear axis with internal motor The miniature linear stage achieves very good running values with backlash-free cross roller bearing. The drive is integrated into the highly compact ...

Stroke : 200 mm - 850 mm
Speed: 15 mm/s - 30 mm/s
Repeatability: 0.4 µm - 0.5 µm

... controller Fields of application Semiconductor manufacturing & handling, high-load DUV positioning, positioning for scanning applications, transfer positioning, semiconductor ...