Steinmeyer open-loop positioning stages

Stroke : 1 mm - 185 mm
Speed: 1 mm/s - 8.4 mm/s
Repeatability: 0.4 µm - 5 µm

LA95 - Application: transport stage, scanning stage - Benefit: high life time despite dry lube - Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 2.2 mm/s
Repeatability: 1 µm - 5 µm

HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.7 µm - 5 µm

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 3.4 mm/s
Repeatability: 0.3 µm - 5 µm

HT240 Precise high load vertical lifting stage Application: Vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV ...

Load: 1 kg - 12 kg

DT310 Flat rotary stage with large aperture The high-precision rotary stage, with its flat design and excellent process accuracy, enables a wide range of applications. Due to its large aperture, ...

Stroke : 1 mm - 25 mm
Speed: 1 mm/s - 8.3 mm/s
Repeatability: 0.5 µm - 5 µm

... to 25 mm. Thanks to our modular axis systems, it can be effortlessly combined with matching DT series rotary stages or PLT series linear stages to create complex multi-axis systems. Suitable for industrial ...

Stroke : 1 mm - 16 mm
Speed: 1 mm/s - 16.6 mm/s
Repeatability: 0.5 µm - 5 µm

HT160 High precision lifting stage The lifting stage HT160 is suitable for high precision vertical move­ments. The combination of geared motors and a precise ball screw enables very small adjustment ...

Stroke : 1 mm - 80 mm
Speed: 1 mm/s - 60 mm/s
Repeatability: 0.7 µm - 5 µm

MT130 Compact linear stage with internal motor The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact ...