Steinmeyer piezoelectric positioning stages

Stroke : 1 mm - 300 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.015 µm - 5 µm

LA97 Nanometer linear stage Application: scanning Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can ...

Stroke : 1 mm - 10 mm
Speed: 0.2 mm/s - 10 mm/s
Repeatability: 0.2 µm - 5 µm

MT53 High-resolution micro stage Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all ...

Stroke : 1 mm - 50 mm
Speed: 1 mm/s - 50 mm/s
Repeatability: 0.3 µm - 5 µm

... low-magnetic and magnet-free versions • Different motor variants: Nanomotion or piezo motor • Combinable with XYZ positioning system (e.g. MT105) • Combinable with rotary stages ...

Speed: 180 mm/s - 270 mm/s
Repeatability: 0.001 µm - 1 µm
Load: 3 kg

... under limited installation space This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. The 36 mm transmitted light allows precise positioning, measurement ...

Stroke : 360 mm - 360 mm
Speed: 200 mm/s - 300 mm/s

High-resolution rotary stage with large aperture UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0003°, speed 300°/s, load 5 kg • - Cleanroom: variants up to class ISO 6 (higher on request) • - Vacuum: all ranges ...

Stroke : 10 mm
Speed: 5 m/s
Repeatability: 0.2 µm - 0.3 µm

... in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications ...

Stroke : 20 mm - 200 mm
Speed: 5 mm/s - 10 mm/s
Repeatability: 0.02 µm - 30 µm

Precise verticalLA97-MT85 Application: Multi-purpose manipulator Benefit: for high-resolution scanning Features: Positioning with very high resolution • - Vacuum: all pressure ranges HV / UHV up to 10-11 • - ...

Stroke : 25 mm - 50 mm
Speed: 2.5 mm/s - 5 mm/s
Repeatability: 0.2 µm - 0.3 µm

... axis positioning system • - Magnetism: magnetic, low-magnet, magnet-free • - EUV lubrication, flour-free / PFAS-free UHV lubrication • - Customized development with 3D design, prototypes, series production Fields ...

Stroke : 1 mm - 10 mm
Speed: 2.5 mm/s - 5 mm/s
Repeatability: 0.2 µm - 0.3 µm

... , series production Fields of application Positioning in small dimensions in the EUV cleanroom e.g. camera, microscope / sensor (AFM, WLI), transillumination measurements, microscopy positioning, ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 100 mm/s
Repeatability: 0.2 µm - 5 µm

MT105 Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all pressure ranges HV /UHV down to 10E-11 mbar • ...